Fingerprint
Dive into the research topics of 'Dry release fabrication and testing of SiC electrostatic cantilever actuators'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Liudi Jiang*, M. Hassan, R. Cheung, A. J. Harris, J. S. Burdess, C. A. Zorman, M. Mehregany
Research output: Contribution to journal › Conference article › peer-review