TY - GEN
T1 - On the effects of temperature and relative humidity on the response of a MEMS arch resonator
AU - Hasan, Mohammad H.
AU - Ouakad, Hassen M.
AU - Alsaleem, Fadi
N1 - Publisher Copyright:
© Copyright 2017 ASME.
PY - 2017
Y1 - 2017
N2 - In this paper, we present a comprehensive model to simulate the behavior of a general MEMS arch resonator under various thermal conditions. The model takes into account the changes in the microbeam's parameters, air properties and the internal stresses due to temperature and humidity. The continuous, flexible, initially curved microbeam was excited linearly and nonlinearly around both its first and third modal natural frequencies. It was found that the mutual effects of temperature and humidity on air viscosity is amplified over four times when the microbeam is operated in the nonlinear regime. Furthermore, results showed that the relative humidity influence is more severe at higher values of the temperature. Finally, the microbeam's frequency shift due to change in humidity increases when operating the microbeam at its third natural frequency compared to first natural frequency.
AB - In this paper, we present a comprehensive model to simulate the behavior of a general MEMS arch resonator under various thermal conditions. The model takes into account the changes in the microbeam's parameters, air properties and the internal stresses due to temperature and humidity. The continuous, flexible, initially curved microbeam was excited linearly and nonlinearly around both its first and third modal natural frequencies. It was found that the mutual effects of temperature and humidity on air viscosity is amplified over four times when the microbeam is operated in the nonlinear regime. Furthermore, results showed that the relative humidity influence is more severe at higher values of the temperature. Finally, the microbeam's frequency shift due to change in humidity increases when operating the microbeam at its third natural frequency compared to first natural frequency.
UR - http://www.scopus.com/inward/record.url?scp=85034777154&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85034777154&partnerID=8YFLogxK
U2 - 10.1115/DETC2017-68241
DO - 10.1115/DETC2017-68241
M3 - Conference contribution
AN - SCOPUS:85034777154
T3 - Proceedings of the ASME Design Engineering Technical Conference
BT - 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
PB - American Society of Mechanical Engineers(ASME)
T2 - ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
Y2 - 6 August 2017 through 9 August 2017
ER -