On the effects of temperature and relative humidity on the response of a MEMS arch resonator

Mohammad H. Hasan, Hassen M. Ouakad, Fadi Alsaleem

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, we present a comprehensive model to simulate the behavior of a general MEMS arch resonator under various thermal conditions. The model takes into account the changes in the microbeam's parameters, air properties and the internal stresses due to temperature and humidity. The continuous, flexible, initially curved microbeam was excited linearly and nonlinearly around both its first and third modal natural frequencies. It was found that the mutual effects of temperature and humidity on air viscosity is amplified over four times when the microbeam is operated in the nonlinear regime. Furthermore, results showed that the relative humidity influence is more severe at higher values of the temperature. Finally, the microbeam's frequency shift due to change in humidity increases when operating the microbeam at its third natural frequency compared to first natural frequency.

Original languageEnglish
Title of host publication22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers(ASME)
ISBN (Electronic)9780791858165
DOIs
Publication statusPublished - Jan 1 2017
Externally publishedYes
EventASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 - Cleveland, United States
Duration: Aug 6 2017Aug 9 2017

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Other

OtherASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
CountryUnited States
CityCleveland
Period8/6/178/9/17

ASJC Scopus subject areas

  • Mechanical Engineering
  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Modelling and Simulation

Cite this

Hasan, M. H., Ouakad, H. M., & Alsaleem, F. (2017). On the effects of temperature and relative humidity on the response of a MEMS arch resonator. In 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4). American Society of Mechanical Engineers(ASME). https://doi.org/10.1115/DETC2017-68241