On the effects of temperature and relative humidity on the response of a MEMS arch resonator

Mohammad H. Hasan, Hassen M. Ouakad, Fadi Alsaleem

نتاج البحث

4 اقتباسات (Scopus)

ملخص

In this paper, we present a comprehensive model to simulate the behavior of a general MEMS arch resonator under various thermal conditions. The model takes into account the changes in the microbeam's parameters, air properties and the internal stresses due to temperature and humidity. The continuous, flexible, initially curved microbeam was excited linearly and nonlinearly around both its first and third modal natural frequencies. It was found that the mutual effects of temperature and humidity on air viscosity is amplified over four times when the microbeam is operated in the nonlinear regime. Furthermore, results showed that the relative humidity influence is more severe at higher values of the temperature. Finally, the microbeam's frequency shift due to change in humidity increases when operating the microbeam at its third natural frequency compared to first natural frequency.

اللغة الأصليةEnglish
عنوان منشور المضيف22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
ناشرAmerican Society of Mechanical Engineers(ASME)
رقم المعيار الدولي للكتب (الإلكتروني)9780791858165
المعرِّفات الرقمية للأشياء
حالة النشرPublished - 2017
منشور خارجيًانعم
الحدثASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 - Cleveland
المدة: أغسطس ٦ ٢٠١٧أغسطس ٩ ٢٠١٧

سلسلة المنشورات

الاسمProceedings of the ASME Design Engineering Technical Conference
مستوى الصوت4

Other

OtherASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
الدولة/الإقليمUnited States
المدينةCleveland
المدة٨/٦/١٧٨/٩/١٧

ASJC Scopus subject areas

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