Dynamics of V-Shaped Electrothermal MEMS-Based Resonators

Nouha Alcheikh, Hassen M. Ouakad*, Mohammad I. Younis

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams.

Original languageEnglish
Article number9181413
Pages (from-to)1372-1381
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume29
Issue number5
DOIs
Publication statusPublished - Oct 1 2020
Externally publishedYes

Keywords

  • crossing and veering phenomenon
  • electrothermal actuation
  • MEMS
  • parameter study
  • V- and arc-shaped micro-resonators

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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