Dynamics of V-Shaped Electrothermal MEMS-Based Resonators

Nouha Alcheikh, Hassen M. Ouakad*, Mohammad I. Younis

*المؤلف المقابل لهذا العمل

نتاج البحث: المساهمة في مجلةمراجعة النظراء

12 اقتباسات (Scopus)

ملخص

In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams.

اللغة الأصليةEnglish
رقم المقال9181413
الصفحات (من إلى)1372-1381
عدد الصفحات10
دوريةJournal of Microelectromechanical Systems
مستوى الصوت29
رقم الإصدار5
المعرِّفات الرقمية للأشياء
حالة النشرPublished - أكتوبر 2020
منشور خارجيًانعم

ASJC Scopus subject areas

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بصمة

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