ملخص
In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams.
اللغة الأصلية | English |
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رقم المقال | 9181413 |
الصفحات (من إلى) | 1372-1381 |
عدد الصفحات | 10 |
دورية | Journal of Microelectromechanical Systems |
مستوى الصوت | 29 |
رقم الإصدار | 5 |
المعرِّفات الرقمية للأشياء | |
حالة النشر | Published - أكتوبر 2020 |
منشور خارجيًا | نعم |
ASJC Scopus subject areas
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