Structural behavior of microbeams actuated by out-of-plane electrostatic fringing-fields

Hassen M. Ouakad*

*المؤلف المقابل لهذا العمل

نتاج البحث

9 اقتباسات (Scopus)

ملخص

In this paper, we present an investigation of the static behavior of a doubly-clamped microbeam actuated electrically through out-of-plane electrostatic fringing-fields. The distributed electrostatic force is caused by the asymmetry of the fringing-fields. This is actually due to the out-of-plane asymmetry of the beam and its two actuating stationary electrodes. The electric force was approximated by means of fitting the results of two-dimensional numerical solution of the electrostatic problem using Finite-Element Method (FEM). Then, a reduced-order model (ROM) was built using the Galerkin decomposition with linear undamped modes of a clamped-clamped beam as base functions. The ROM equations are solved numerically to get the static response of the considered micro-actuator when actuated by a DC load. Results shows possibility of having three different regimes for this particular MEMS device: a bending regime, a catenary regime, and an elastic regime. Eigenvalue problem is then solved to get the variation of the fundamental natural frequency when the system is deflected by a DC load. Results show that controlling the microbeam stroke, with a DC voltage on the gate electrodes, enables us to tune the system frequency, resulting in a possibility of a tunable MEMS device without a pull-in scenario.

اللغة الأصليةEnglish
عنوان منشور المضيفMicro- and Nano-Systems Engineering and Packaging
ناشرAmerican Society of Mechanical Engineers(ASME)
رقم المعيار الدولي للكتب (المطبوع)9780791856390
المعرِّفات الرقمية للأشياء
حالة النشرPublished - 2013
منشور خارجيًانعم
الحدثASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013 - San Diego, CA
المدة: نوفمبر ١٥ ٢٠١٣نوفمبر ٢١ ٢٠١٣

سلسلة المنشورات

الاسمASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
مستوى الصوت10

Other

OtherASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013
الدولة/الإقليمUnited States
المدينةSan Diego, CA
المدة١١/١٥/١٣١١/٢١/١٣

ASJC Scopus subject areas

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