Structural behavior of microbeams actuated by out-of-plane electrostatic fringing-fields

Hassen M. Ouakad*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

In this paper, we present an investigation of the static behavior of a doubly-clamped microbeam actuated electrically through out-of-plane electrostatic fringing-fields. The distributed electrostatic force is caused by the asymmetry of the fringing-fields. This is actually due to the out-of-plane asymmetry of the beam and its two actuating stationary electrodes. The electric force was approximated by means of fitting the results of two-dimensional numerical solution of the electrostatic problem using Finite-Element Method (FEM). Then, a reduced-order model (ROM) was built using the Galerkin decomposition with linear undamped modes of a clamped-clamped beam as base functions. The ROM equations are solved numerically to get the static response of the considered micro-actuator when actuated by a DC load. Results shows possibility of having three different regimes for this particular MEMS device: a bending regime, a catenary regime, and an elastic regime. Eigenvalue problem is then solved to get the variation of the fundamental natural frequency when the system is deflected by a DC load. Results show that controlling the microbeam stroke, with a DC voltage on the gate electrodes, enables us to tune the system frequency, resulting in a possibility of a tunable MEMS device without a pull-in scenario.

Original languageEnglish
Title of host publicationMicro- and Nano-Systems Engineering and Packaging
PublisherAmerican Society of Mechanical Engineers(ASME)
ISBN (Print)9780791856390
DOIs
Publication statusPublished - Jan 1 2013
Externally publishedYes
EventASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013 - San Diego, CA, United States
Duration: Nov 15 2013Nov 21 2013

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume10

Other

OtherASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013
CountryUnited States
CitySan Diego, CA
Period11/15/1311/21/13

ASJC Scopus subject areas

  • Mechanical Engineering

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