Investigations into the linear coupling between symmetric and anti-symmetric modes of v-shaped mems resonators under electrostatic perturbation

Nouha Alcheikh, Hassen M. Ouakad, Sofiane Ben Mbarek, Mohammad I. Younis

نتاج البحث

1 اقتباس (Scopus)

ملخص

In this paper, we investigate experimentally and theoretically the linear coupling between the first two symmetric and anti-symmetric modes of an electrothermally and electrostatically actuated in-plane V-shaped micro-beam. The micro-beam is fabricated from highly doped silicon and is sandwiched between four electrodes to electrostatically activate both modes of vibrations. When tuning the electrothermal voltage, the natural frequencies of the two modes approach each other until they cross. Under electrostatic actuation, it is shown experimentally that the system undergoes a transition between modes crossing to veering. In addition, an analytical study is presented based on a Galerkin-based reduced-order model of a nonlinear Euler–Bernoulli shallow arch beam equation. The analytical results are compared to experimental data showing excellent agreement.

اللغة الأصليةEnglish
عنوان منشور المضيفDynamics, Vibration, and Control
ناشرAmerican Society of Mechanical Engineers (ASME)
رقم المعيار الدولي للكتب (الإلكتروني)9780791885611
المعرِّفات الرقمية للأشياء
حالة النشرPublished - 2021
الحدثASME 2021 International Mechanical Engineering Congress and Exposition, IMECE 2021 - Virtual, Online
المدة: نوفمبر ١ ٢٠٢١نوفمبر ٥ ٢٠٢١

سلسلة المنشورات

الاسمASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
مستوى الصوت7A-2021

Conference

ConferenceASME 2021 International Mechanical Engineering Congress and Exposition, IMECE 2021
المدينةVirtual, Online
المدة١١/١/٢١١١/٥/٢١

ASJC Scopus subject areas

  • ???subjectarea.asjc.2200.2210???

بصمة

أدرس بدقة موضوعات البحث “Investigations into the linear coupling between symmetric and anti-symmetric modes of v-shaped mems resonators under electrostatic perturbation'. فهما يشكلان معًا بصمة فريدة.

قم بذكر هذا