Investigations into the linear coupling between symmetric and anti-symmetric modes of v-shaped mems resonators under electrostatic perturbation

Nouha Alcheikh, Hassen M. Ouakad, Sofiane Ben Mbarek, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we investigate experimentally and theoretically the linear coupling between the first two symmetric and anti-symmetric modes of an electrothermally and electrostatically actuated in-plane V-shaped micro-beam. The micro-beam is fabricated from highly doped silicon and is sandwiched between four electrodes to electrostatically activate both modes of vibrations. When tuning the electrothermal voltage, the natural frequencies of the two modes approach each other until they cross. Under electrostatic actuation, it is shown experimentally that the system undergoes a transition between modes crossing to veering. In addition, an analytical study is presented based on a Galerkin-based reduced-order model of a nonlinear Euler–Bernoulli shallow arch beam equation. The analytical results are compared to experimental data showing excellent agreement.

Original languageEnglish
Title of host publicationDynamics, Vibration, and Control
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791885611
DOIs
Publication statusPublished - 2021
EventASME 2021 International Mechanical Engineering Congress and Exposition, IMECE 2021 - Virtual, Online
Duration: Nov 1 2021Nov 5 2021

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume7A-2021

Conference

ConferenceASME 2021 International Mechanical Engineering Congress and Exposition, IMECE 2021
CityVirtual, Online
Period11/1/2111/5/21

ASJC Scopus subject areas

  • Mechanical Engineering

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