An electrostatically actuated MEMS arch band-pass filter

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

This work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Galerkin-based reduced-order model when excited near its fundamental and third natural frequencies. Several simulation results are presented demonstrating interesting jumps and snap-through behavior of the arches and their attractive features for uses as band-pass filters, such as their sharp roll-off from pass bands to stop bands and their flat response.

Original languageEnglish
Pages (from-to)809-819
Number of pages11
JournalShock and Vibration
Volume20
Issue number4
DOIs
Publication statusPublished - Jan 1 2013
Externally publishedYes

Keywords

  • arches
  • dynamic snap-through
  • filters
  • MEMS

ASJC Scopus subject areas

  • Civil and Structural Engineering
  • Condensed Matter Physics
  • Geotechnical Engineering and Engineering Geology
  • Mechanics of Materials
  • Mechanical Engineering

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