Abstract
This work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Galerkin-based reduced-order model when excited near its fundamental and third natural frequencies. Several simulation results are presented demonstrating interesting jumps and snap-through behavior of the arches and their attractive features for uses as band-pass filters, such as their sharp roll-off from pass bands to stop bands and their flat response.
Original language | English |
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Pages (from-to) | 809-819 |
Number of pages | 11 |
Journal | Shock and Vibration |
Volume | 20 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2013 |
Externally published | Yes |
Keywords
- arches
- dynamic snap-through
- filters
- MEMS
ASJC Scopus subject areas
- Civil and Structural Engineering
- Condensed Matter Physics
- Geotechnical Engineering and Engineering Geology
- Mechanics of Materials
- Mechanical Engineering