Static and bifurcation analysis of MEMS arches actuated by electrostatic fringing fields

Physics

• Microbeam 100%
• Electrostatics 75%
• Microelectromechanical System 75%
• Electric Fields 50%
• Decomposition 50%
• Snap-Through 50%
• Electric Potential 25%
• Deflection 25%
• Electrodes 25%
• Bifurcation 25%
• Resonant Frequencies 25%
• Asymmetry 25%
• Parallel Plate 25%

Computer Science

• Stationary Electrode 25%
• Bistable Device 25%
• Direction Opposite 25%
• Static Analysis 25%