X-ray diffraction measurement of residual stress in sol-gel grown lead zirconate titanate thick films on nickel-based super alloy substrate

Hamidreza Hoshyarmanesh, Naser Nehzat, Mehdi Salehi, Mojtaba Ghodsi

Research output: Contribution to journalArticle

Abstract

Residual compressive stress of Pb(Zr0.52Ti0.48)O3 thick films was investigated using residual strains derived from X-ray diffraction patterns. Sin2ψ method was applied for the 5, 10 and 15 µm sol-gel derived thick films annealed at 700°C for 1 hr as high frequency structural health monitoring square-shape transducers of 10×10 mm, deposited onto the curved nickel-based super alloy substrates. A triaxial model was proposed based on piezoelectric constitutive equations, and Bragg’s law at a large diffraction angle (∼89º) was utilized considering the electromechanical coupling factor as well as elastic, dielectric and piezoelectric constants. Thickness variations led to a significant change in residual stress magnitudes delineated from more-accurate triaxial model compared to small angle plane-stress results not considering the piezoelectric coupling effects.

Original languageEnglish
Pages (from-to)715-721
Number of pages7
JournalRussian Journal of Pacific Geology
Volume9
Issue number1
DOIs
Publication statusPublished - 2015

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Keywords

  • PZT thick film
  • Sol-gel deposition
  • Supper alloy substrate
  • Triaxial residual stress
  • X-ray diffraction

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Geology
  • Geophysics
  • Oceanography
  • Palaeontology
  • Stratigraphy

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