TY - GEN
T1 - Towards development of a one-port resonant sensor for robotic-based microassembly force measurement
AU - Bahadur, Issam B.
AU - Mills, James K.
PY - 2006
Y1 - 2006
N2 - A basic analytical and simulation model of a novel integration of a double-ended tuning fork (DETF) resonant force sensor into a compliant, passive microgripper is presented. The proposed design consists of three main parts: a microgripper, a microlever system, and a one-port, parallel-plat DETF force sensor. A stress relief spring is utilized as a passive temperature compensation method, which reduces the force sensor sensitivity to the ambient temperature change by 86%. DETF sensitivity to a change in the ambient temperature is numerically evaluated. On the other hand, the frequency dependence on forces, less than 120 μN, is also studied. In particular, the sensor is specifically designed to be only sensitive to the normal forces (i.e., microgripping forces) in the microgripper jaw. This condition reduces unnecessary model complexity. However, this approach works for microgripping forces larger than 100 μN. The simplicity of the force sensor, however, provides strong motivation and feasibility for their use in microgripping and microassembly applications.
AB - A basic analytical and simulation model of a novel integration of a double-ended tuning fork (DETF) resonant force sensor into a compliant, passive microgripper is presented. The proposed design consists of three main parts: a microgripper, a microlever system, and a one-port, parallel-plat DETF force sensor. A stress relief spring is utilized as a passive temperature compensation method, which reduces the force sensor sensitivity to the ambient temperature change by 86%. DETF sensitivity to a change in the ambient temperature is numerically evaluated. On the other hand, the frequency dependence on forces, less than 120 μN, is also studied. In particular, the sensor is specifically designed to be only sensitive to the normal forces (i.e., microgripping forces) in the microgripper jaw. This condition reduces unnecessary model complexity. However, this approach works for microgripping forces larger than 100 μN. The simplicity of the force sensor, however, provides strong motivation and feasibility for their use in microgripping and microassembly applications.
KW - DETF
KW - MEMS
KW - Microassembly
KW - Microgripper
KW - Resonant force sensing
UR - http://www.scopus.com/inward/record.url?scp=34247186834&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34247186834&partnerID=8YFLogxK
U2 - 10.1109/ICMA.2006.257598
DO - 10.1109/ICMA.2006.257598
M3 - Conference contribution
AN - SCOPUS:34247186834
SN - 1424404665
SN - 9781424404667
T3 - 2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006
SP - 469
EP - 474
BT - 2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006
T2 - 2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006
Y2 - 25 June 2006 through 28 June 2006
ER -