Thickness and thermal processing contribution on piezoelectric characteristics of Pb(Zr-Ti)O3 thick films deposited on curved IN738 using sol-gel technique

Hamidreza Hoshyarmanesh, Naser Nehzat, Mehdi Salehi, Mojtaba Ghodsi, Hong Sub Lee, Hyung Ho Park

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Lead zirconate-titanate (PZT) thick films of perovskite structure Pb(ZrxTi1-x)O3 were fabricated on the curved surface of IN738 nickel-based supper alloy substrate up to 15 mm thickness using sol-gel deposition technique without polyvinylpyrrolidone. The films were heated at 200° with 10 wt% excess PbO, pyrolyzed at 400°, and subsequently annealed at 650°, 700°, and 800°. Au and Pt thin films were deposited as bottom and top electrodes, respectively. PZT films of different thicknesses and thermal treatment conditions were characterized to investigate the effect of process on crystalline phase development, orientation, and microstructure morphology. Thereby, formation of fairly smooth, semi-dense, and crack-free random orientated thick films as well as an increase in the average grain size and stress relaxation was observed as the film thickness increased. Having optimized the coating process, intrinsic and extrinsic dielectric, ferroelectric and piezoelectric properties were measured as a function of the film thickness, orientation, grain size, and domain wall motions to evaluate the remnant polarization (Pr=7.6-17.5 mC/cm2), coercive field (Ec=2.5-4 kV/ cm), permittivity ("r=276-326), dielectric loss (tan(%)=2.7-3), and piezoelectric charge coefficient (d33=71-145 pm/ V) of the PZT thick films prepared potentially to be used as high bandwidth 1-5 MHz structural health monitoring transducers.

Original languageEnglish
Pages (from-to)511-521
Number of pages11
JournalProceedings of the Institution of Mechanical Engineers, Part L: Journal of Materials: Design and Applications
Volume229
Issue number6
DOIs
Publication statusPublished - 2015

Fingerprint

Thick films
Sol-gels
Film thickness
Povidone
Structural health monitoring
Domain walls
Stress relaxation
Dielectric losses
Nickel
Crystal orientation
Perovskite
Ferroelectric materials
Transducers
Permittivity
Lead
Heat treatment
Polarization
Crystalline materials
Cracks
Bandwidth

Keywords

  • Curved substrate
  • Ferroelectric properties
  • Nickel-based super alloy
  • PZT thick film
  • Sol-gel deposition

ASJC Scopus subject areas

  • Mechanical Engineering
  • Materials Science(all)

Cite this

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title = "Thickness and thermal processing contribution on piezoelectric characteristics of Pb(Zr-Ti)O3 thick films deposited on curved IN738 using sol-gel technique",
abstract = "Lead zirconate-titanate (PZT) thick films of perovskite structure Pb(ZrxTi1-x)O3 were fabricated on the curved surface of IN738 nickel-based supper alloy substrate up to 15 mm thickness using sol-gel deposition technique without polyvinylpyrrolidone. The films were heated at 200° with 10 wt{\%} excess PbO, pyrolyzed at 400°, and subsequently annealed at 650°, 700°, and 800°. Au and Pt thin films were deposited as bottom and top electrodes, respectively. PZT films of different thicknesses and thermal treatment conditions were characterized to investigate the effect of process on crystalline phase development, orientation, and microstructure morphology. Thereby, formation of fairly smooth, semi-dense, and crack-free random orientated thick films as well as an increase in the average grain size and stress relaxation was observed as the film thickness increased. Having optimized the coating process, intrinsic and extrinsic dielectric, ferroelectric and piezoelectric properties were measured as a function of the film thickness, orientation, grain size, and domain wall motions to evaluate the remnant polarization (Pr=7.6-17.5 mC/cm2), coercive field (Ec=2.5-4 kV/ cm), permittivity ({"}r=276-326), dielectric loss (tan({\%})=2.7-3), and piezoelectric charge coefficient (d33=71-145 pm/ V) of the PZT thick films prepared potentially to be used as high bandwidth 1-5 MHz structural health monitoring transducers.",
keywords = "Curved substrate, Ferroelectric properties, Nickel-based super alloy, PZT thick film, Sol-gel deposition",
author = "Hamidreza Hoshyarmanesh and Naser Nehzat and Mehdi Salehi and Mojtaba Ghodsi and Lee, {Hong Sub} and Park, {Hyung Ho}",
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T1 - Thickness and thermal processing contribution on piezoelectric characteristics of Pb(Zr-Ti)O3 thick films deposited on curved IN738 using sol-gel technique

AU - Hoshyarmanesh, Hamidreza

AU - Nehzat, Naser

AU - Salehi, Mehdi

AU - Ghodsi, Mojtaba

AU - Lee, Hong Sub

AU - Park, Hyung Ho

PY - 2015

Y1 - 2015

N2 - Lead zirconate-titanate (PZT) thick films of perovskite structure Pb(ZrxTi1-x)O3 were fabricated on the curved surface of IN738 nickel-based supper alloy substrate up to 15 mm thickness using sol-gel deposition technique without polyvinylpyrrolidone. The films were heated at 200° with 10 wt% excess PbO, pyrolyzed at 400°, and subsequently annealed at 650°, 700°, and 800°. Au and Pt thin films were deposited as bottom and top electrodes, respectively. PZT films of different thicknesses and thermal treatment conditions were characterized to investigate the effect of process on crystalline phase development, orientation, and microstructure morphology. Thereby, formation of fairly smooth, semi-dense, and crack-free random orientated thick films as well as an increase in the average grain size and stress relaxation was observed as the film thickness increased. Having optimized the coating process, intrinsic and extrinsic dielectric, ferroelectric and piezoelectric properties were measured as a function of the film thickness, orientation, grain size, and domain wall motions to evaluate the remnant polarization (Pr=7.6-17.5 mC/cm2), coercive field (Ec=2.5-4 kV/ cm), permittivity ("r=276-326), dielectric loss (tan(%)=2.7-3), and piezoelectric charge coefficient (d33=71-145 pm/ V) of the PZT thick films prepared potentially to be used as high bandwidth 1-5 MHz structural health monitoring transducers.

AB - Lead zirconate-titanate (PZT) thick films of perovskite structure Pb(ZrxTi1-x)O3 were fabricated on the curved surface of IN738 nickel-based supper alloy substrate up to 15 mm thickness using sol-gel deposition technique without polyvinylpyrrolidone. The films were heated at 200° with 10 wt% excess PbO, pyrolyzed at 400°, and subsequently annealed at 650°, 700°, and 800°. Au and Pt thin films were deposited as bottom and top electrodes, respectively. PZT films of different thicknesses and thermal treatment conditions were characterized to investigate the effect of process on crystalline phase development, orientation, and microstructure morphology. Thereby, formation of fairly smooth, semi-dense, and crack-free random orientated thick films as well as an increase in the average grain size and stress relaxation was observed as the film thickness increased. Having optimized the coating process, intrinsic and extrinsic dielectric, ferroelectric and piezoelectric properties were measured as a function of the film thickness, orientation, grain size, and domain wall motions to evaluate the remnant polarization (Pr=7.6-17.5 mC/cm2), coercive field (Ec=2.5-4 kV/ cm), permittivity ("r=276-326), dielectric loss (tan(%)=2.7-3), and piezoelectric charge coefficient (d33=71-145 pm/ V) of the PZT thick films prepared potentially to be used as high bandwidth 1-5 MHz structural health monitoring transducers.

KW - Curved substrate

KW - Ferroelectric properties

KW - Nickel-based super alloy

KW - PZT thick film

KW - Sol-gel deposition

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