The static and dynamic behavior of mems arches under electrostatic actuation

Mohammad I. Younis, Hassen M. Ouakad

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

In this paper, we investigate the static and dynamic behavior of electrostatically actuated clamped-clamped micromachined arches. The Galerkin method is used to discretize the distributed-parameter model of the considered shallow arch, and thus approximate it by a set of nonlinear algebraic equations and ordinary-differential equations describing its statics and dynamics. Five symmetric mode shapes of either a straight beam or a deformed arch is found to be sufficient to simulate the static and dynamic behavior of the arch. The natural frequencies and mode shapes of the arch are calculated for various values of DC voltages and initial rises of the arch. The forced vibration response of the arch to a combined DC and AC harmonic load is determined when excited near its fundamental natural frequency. The results show various nonlinear behaviors, such as hysteresis, softening behavior, and dynamic pull-in. Several scenarios of snap-through and pull-in are shown, which found depend on the initial rise of the arch.

Original languageEnglish
Title of host publication2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009
DOIs
Publication statusPublished - Nov 23 2009
Externally publishedYes
Event2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009 - Sharjah, United Arab Emirates
Duration: Mar 23 2009Mar 26 2009

Publication series

Name2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009

Other

Other2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009
CountryUnited Arab Emirates
CitySharjah
Period3/23/093/26/09

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this