Static and bifurcation analysis of MEMS arches actuated by electrostatic fringing fields

Hassen M. Ouakad, Tausif F. Mohammad

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this work, we investigate a micro-electromechanical system (MEMS) arch microbeam actuated by fringing electric field where the electrodes are located at both side of the microbeam. An electrostatic force caused by asymmetry of the fringing electric fields acts in a direction opposite to the relative deflection of the microbeam, resulting in a restoring electrostatic force which increasing with the applied DC voltage. A reduced-order model (ROM) is derived for the considered system using the so-called Galerkin decomposition and assuming linear undamped mode shapes of a straight beam as basis functions in the decomposition process. A static analysis is performed to investigate the occurrence of the snap-through instability. The eigenvalue problem is then investigated to obtain the fundamental as well as higher natural frequencies variation of the microbeam with the applied DC load. A bifurcation analysis is then implemented to derive a criterion for whether symmetric or asymmetric bifurcation is occurring during the static snap-through instability. The results show elimination of the so-called pull-in instability in this kind of systems as the stationary electrodes are located on either sides rather than at the bottom as in case parallel plate actuation. This system can be useful to design pull-in free MEMS bi-stable devices.

Original languageEnglish
Title of host publicationMESA 2014 - 10th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479922802
DOIs
Publication statusPublished - Oct 24 2014
Externally publishedYes
Event10th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2014 - Senigallia, Ancona, Italy
Duration: Sep 10 2014Sep 12 2014

Publication series

NameMESA 2014 - 10th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, Conference Proceedings

Conference

Conference10th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2014
CountryItaly
CitySenigallia, Ancona
Period9/10/149/12/14

Keywords

  • Arches
  • Bifurcations
  • Eigenvalue
  • MEMS
  • Static

ASJC Scopus subject areas

  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Ouakad, H. M., & Mohammad, T. F. (2014). Static and bifurcation analysis of MEMS arches actuated by electrostatic fringing fields. In MESA 2014 - 10th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, Conference Proceedings [6935551] (MESA 2014 - 10th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, Conference Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MESA.2014.6935551