Optimized v-shaped beam micro-electrothermal actuator using particle swarm optimization (Pso) technique

Salah Eldeen Osman, Musaab Zarog*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Background: Electrothermal microactuators are very promising for wide range of Microelectromechanical Systems (MEMS) applications due to the low voltage requirement and large force produced. Method: A new optimized V-beam electrothermal micro actuator was implemented in variable optical attenuator. In this work, Particle Swarm Optimization (PSO) technique is proposed to design the Vshaped beam. Result: The approach has successfully improved both angular displacement & output force of the microactuator. Entropy generation rate was used as optimization criteria.

Original languageEnglish
Pages (from-to)62-67
Number of pages6
JournalMicro and Nanosystems
Volume11
Issue number1
DOIs
Publication statusPublished - Jan 1 2019

Keywords

  • Entropy
  • Genetic algorithms
  • Microactuators
  • PSO
  • RF MEMS
  • Variable optical attenuator

ASJC Scopus subject areas

  • Building and Construction

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