TY - GEN
T1 - Nonlinear structural behavior of double-layers based mems actuator
AU - Al-Oufi, Abdulrahman
AU - Ouakad, Hassen M.
AU - Firaque, Mohammad Tausiff
N1 - Publisher Copyright:
Copyright © 2016 by ASME.
PY - 2016
Y1 - 2016
N2 - In this paper, the static behavior of a micro-electromechanical system (MEMS) based on two electrically coupled parallel clamped-clamped microbeams is investigated. The assumed discretization technique in this investigation is the reducedorder modeling (ROM). The ROM was derived based on the Galerkin expansion method while assuming linear undamped mode shapes of a straight fixed-fixed beam as the basis functions. The results showed that the double-microbeam MEMS switch configuration requires a lower actuation voltage and a lower switching time as compared to the single microbeam actuator. Then, the effects of both microbeams air gap depths were investigated. Finally, the eigenvalue problem was investigated to get the variation of the fundamental natural frequencies of the coupled parallel microbeams with the applied actuating DC load.
AB - In this paper, the static behavior of a micro-electromechanical system (MEMS) based on two electrically coupled parallel clamped-clamped microbeams is investigated. The assumed discretization technique in this investigation is the reducedorder modeling (ROM). The ROM was derived based on the Galerkin expansion method while assuming linear undamped mode shapes of a straight fixed-fixed beam as the basis functions. The results showed that the double-microbeam MEMS switch configuration requires a lower actuation voltage and a lower switching time as compared to the single microbeam actuator. Then, the effects of both microbeams air gap depths were investigated. Finally, the eigenvalue problem was investigated to get the variation of the fundamental natural frequencies of the coupled parallel microbeams with the applied actuating DC load.
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U2 - 10.1115/IMECE201666353
DO - 10.1115/IMECE201666353
M3 - Conference contribution
AN - SCOPUS:85021686849
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
BT - Micro- and Nano-Systems Engineering and Packaging
PB - American Society of Mechanical Engineers(ASME)
T2 - ASME 2016 International Mechanical Engineering Congress and Exposition, IMECE 2016
Y2 - 11 November 2016 through 17 November 2016
ER -