Nonlinear structural behavior of double-layers based mems actuator

Abdulrahman Al-Oufi, Hassen M. Ouakad, Mohammad Tausiff Firaque

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, the static behavior of a micro-electromechanical system (MEMS) based on two electrically coupled parallel clamped-clamped microbeams is investigated. The assumed discretization technique in this investigation is the reducedorder modeling (ROM). The ROM was derived based on the Galerkin expansion method while assuming linear undamped mode shapes of a straight fixed-fixed beam as the basis functions. The results showed that the double-microbeam MEMS switch configuration requires a lower actuation voltage and a lower switching time as compared to the single microbeam actuator. Then, the effects of both microbeams air gap depths were investigated. Finally, the eigenvalue problem was investigated to get the variation of the fundamental natural frequencies of the coupled parallel microbeams with the applied actuating DC load.

Original languageEnglish
Title of host publicationMicro- and Nano-Systems Engineering and Packaging
PublisherAmerican Society of Mechanical Engineers(ASME)
ISBN (Electronic)9780791850640
DOIs
Publication statusPublished - Jan 1 2016
Externally publishedYes
EventASME 2016 International Mechanical Engineering Congress and Exposition, IMECE 2016 - Phoenix, United States
Duration: Nov 11 2016Nov 17 2016

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume10

Other

OtherASME 2016 International Mechanical Engineering Congress and Exposition, IMECE 2016
CountryUnited States
CityPhoenix
Period11/11/1611/17/16

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Al-Oufi, A., Ouakad, H. M., & Firaque, M. T. (2016). Nonlinear structural behavior of double-layers based mems actuator. In Micro- and Nano-Systems Engineering and Packaging (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 10). American Society of Mechanical Engineers(ASME). https://doi.org/10.1115/IMECE201666353