TY - JOUR
T1 - Nonlinear dynamics of MEMS arches under harmonic electrostatic actuation
AU - Younis, Mohammad I.
AU - Ouakad, Hassen M.
AU - Alsaleem, Fadi M.
AU - Miles, Ronald
AU - Cui, Weili
N1 - Funding Information:
Manuscript received July 19, 2009; revised February 23, 2010; accepted March 9, 2010. Date of publication April 29, 2010; date of current version June 3, 2010. This work was supported by the National Science Foundation (NSF) under Grant 0700683 and NSF CAREER Award 0846775. Subject Editor D. Elata.
PY - 2010/6
Y1 - 2010/6
N2 - We present an investigation of the nonlinear dynamics of clampedclamped micromachined arches when actuated by a dc electrostatic load superimposed on an ac harmonic load. The Galerkin method is used to discretize the distributed-parameter model of a shallow arch to obtain a reduced-order model. The static response of the arch due to a dc load actuation is simulated, and the results are validated by comparing them to experimental data. The dynamic response of the arch to a combined dc load and ac harmonic load is studied when excited near its fundamental natural frequency, twice its fundamental natural frequency, and near other higher harmonic modes. The results show a variety of interesting nonlinear phenomena, such as hysteresis, softening behavior, dynamic snap-through, and dynamic pull-in. The results are also shown demonstrating the potential to use microelectromechanical systems (MEMS) arches as bandpass filters and low-powered switches. An experimental work is conducted to test arches realized of curved polysilicon microbeams when excited by dc and ac loads. Experimental data are shown for the softening behavior and the dynamic pull-in of the curved microbeams.
AB - We present an investigation of the nonlinear dynamics of clampedclamped micromachined arches when actuated by a dc electrostatic load superimposed on an ac harmonic load. The Galerkin method is used to discretize the distributed-parameter model of a shallow arch to obtain a reduced-order model. The static response of the arch due to a dc load actuation is simulated, and the results are validated by comparing them to experimental data. The dynamic response of the arch to a combined dc load and ac harmonic load is studied when excited near its fundamental natural frequency, twice its fundamental natural frequency, and near other higher harmonic modes. The results show a variety of interesting nonlinear phenomena, such as hysteresis, softening behavior, dynamic snap-through, and dynamic pull-in. The results are also shown demonstrating the potential to use microelectromechanical systems (MEMS) arches as bandpass filters and low-powered switches. An experimental work is conducted to test arches realized of curved polysilicon microbeams when excited by dc and ac loads. Experimental data are shown for the softening behavior and the dynamic pull-in of the curved microbeams.
KW - Arches
KW - Dynamic pull-in
KW - Dynamic snap-through
KW - Electrostatic actuation
KW - Microelectromechanical systems (MEMS)
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U2 - 10.1109/JMEMS.2010.2046624
DO - 10.1109/JMEMS.2010.2046624
M3 - Article
AN - SCOPUS:77953120154
SN - 1057-7157
VL - 19
SP - 647
EP - 656
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 3
M1 - 5456195
ER -