Nanopositioning is increasingly relying on piezoelectric actuators. Nanopositioning systems with piezoelectric actuators (piezo-actuated nanopositioners) are compact, precise and consequently popular. The trend of these systems' development is presented in this paper. Initially, piezoelectric actuators usable in nanopositioning and their features are critically reviewed. Then, design of piezo-actuated nanopositioning systems, with a focus on control systems, is addressed. To do so, different subsystems/components of nanopositioning systems together with their relevant design choices are analysed. In the end, based on the presented comparative and critical review, current prominent questions about design of piezo-actuated nanopositioning systems are answered. Well-supported answers to these crucial questions are beneficial for designers and suggest future trends in nanopositioning.
ASJC Scopus subject areas
- Materials Science(all)