Nanopositioning systems with piezoelectric actuators, current state and future perspective

Morteza Mohammadzaheri, Abdullah AlQallaf

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Nanopositioning is increasingly relying on piezoelectric actuators. Nanopositioning systems with piezoelectric actuators (piezo-actuated nanopositioners) are compact, precise and consequently popular. The trend of these systems' development is presented in this paper. Initially, piezoelectric actuators usable in nanopositioning and their features are critically reviewed. Then, design of piezo-actuated nanopositioning systems, with a focus on control systems, is addressed. To do so, different subsystems/components of nanopositioning systems together with their relevant design choices are analysed. In the end, based on the presented comparative and critical review, current prominent questions about design of piezo-actuated nanopositioning systems are answered. Well-supported answers to these crucial questions are beneficial for designers and suggest future trends in nanopositioning.

Original languageEnglish
Pages (from-to)1071-1080
Number of pages10
JournalScience of Advanced Materials
Volume9
Issue number7
DOIs
Publication statusPublished - 2017

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Piezoelectric actuators
Control systems

Keywords

  • Actuator
  • Control
  • Nanopositioning
  • Piezoelectric

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Nanopositioning systems with piezoelectric actuators, current state and future perspective. / Mohammadzaheri, Morteza; AlQallaf, Abdullah.

In: Science of Advanced Materials, Vol. 9, No. 7, 2017, p. 1071-1080.

Research output: Contribution to journalArticle

@article{70913b55b4884b4b927c0e711fd4f289,
title = "Nanopositioning systems with piezoelectric actuators, current state and future perspective",
abstract = "Nanopositioning is increasingly relying on piezoelectric actuators. Nanopositioning systems with piezoelectric actuators (piezo-actuated nanopositioners) are compact, precise and consequently popular. The trend of these systems' development is presented in this paper. Initially, piezoelectric actuators usable in nanopositioning and their features are critically reviewed. Then, design of piezo-actuated nanopositioning systems, with a focus on control systems, is addressed. To do so, different subsystems/components of nanopositioning systems together with their relevant design choices are analysed. In the end, based on the presented comparative and critical review, current prominent questions about design of piezo-actuated nanopositioning systems are answered. Well-supported answers to these crucial questions are beneficial for designers and suggest future trends in nanopositioning.",
keywords = "Actuator, Control, Nanopositioning, Piezoelectric",
author = "Morteza Mohammadzaheri and Abdullah AlQallaf",
year = "2017",
doi = "10.1166/sam.2017.3088",
language = "English",
volume = "9",
pages = "1071--1080",
journal = "Science of Advanced Materials",
issn = "1947-2935",
publisher = "American Scientific Publishers",
number = "7",

}

TY - JOUR

T1 - Nanopositioning systems with piezoelectric actuators, current state and future perspective

AU - Mohammadzaheri, Morteza

AU - AlQallaf, Abdullah

PY - 2017

Y1 - 2017

N2 - Nanopositioning is increasingly relying on piezoelectric actuators. Nanopositioning systems with piezoelectric actuators (piezo-actuated nanopositioners) are compact, precise and consequently popular. The trend of these systems' development is presented in this paper. Initially, piezoelectric actuators usable in nanopositioning and their features are critically reviewed. Then, design of piezo-actuated nanopositioning systems, with a focus on control systems, is addressed. To do so, different subsystems/components of nanopositioning systems together with their relevant design choices are analysed. In the end, based on the presented comparative and critical review, current prominent questions about design of piezo-actuated nanopositioning systems are answered. Well-supported answers to these crucial questions are beneficial for designers and suggest future trends in nanopositioning.

AB - Nanopositioning is increasingly relying on piezoelectric actuators. Nanopositioning systems with piezoelectric actuators (piezo-actuated nanopositioners) are compact, precise and consequently popular. The trend of these systems' development is presented in this paper. Initially, piezoelectric actuators usable in nanopositioning and their features are critically reviewed. Then, design of piezo-actuated nanopositioning systems, with a focus on control systems, is addressed. To do so, different subsystems/components of nanopositioning systems together with their relevant design choices are analysed. In the end, based on the presented comparative and critical review, current prominent questions about design of piezo-actuated nanopositioning systems are answered. Well-supported answers to these crucial questions are beneficial for designers and suggest future trends in nanopositioning.

KW - Actuator

KW - Control

KW - Nanopositioning

KW - Piezoelectric

UR - http://www.scopus.com/inward/record.url?scp=85019253810&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85019253810&partnerID=8YFLogxK

U2 - 10.1166/sam.2017.3088

DO - 10.1166/sam.2017.3088

M3 - Article

VL - 9

SP - 1071

EP - 1080

JO - Science of Advanced Materials

JF - Science of Advanced Materials

SN - 1947-2935

IS - 7

ER -