Integrated scatter plate and projection lens for scatter plate interferometer

Jari T. Räsänen, Kai Erik Peiponen, Kazi Monowar Abedin, Koji Tenjimbayashi, Tomoaki Eiju, Kiyofumi Matsuda

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Abstract

Scatter plate interferometers provide a precise method to test the quality of concave mirrors. In this article we describe a method to integrate a scatter plate and a projection lens into a single binary micro-optical element, which is a crucial part of the scatter plate interferometer. We have designed an integrated element with the aid of a computer and fabricated it using the e-beam lithography method. We present experimental verification and some computer simulation results.

Original languageEnglish
Pages (from-to)1587-1590
Number of pages4
JournalReview of Scientific Instruments
Volume69
Issue number4
Publication statusPublished - Apr 1998

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ASJC Scopus subject areas

  • Instrumentation

Cite this

Räsänen, J. T., Peiponen, K. E., Abedin, K. M., Tenjimbayashi, K., Eiju, T., & Matsuda, K. (1998). Integrated scatter plate and projection lens for scatter plate interferometer. Review of Scientific Instruments, 69(4), 1587-1590.