Integrated scatter plate and projection lens for scatter plate interferometer

Jari T. Räsänen, Kai Erik Peiponen, Kazi Monowar Abedin, Koji Tenjimbayashi, Tomoaki Eiju, Kiyofumi Matsuda

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Scatter plate interferometers provide a precise method to test the quality of concave mirrors. In this article we describe a method to integrate a scatter plate and a projection lens into a single binary micro-optical element, which is a crucial part of the scatter plate interferometer. We have designed an integrated element with the aid of a computer and fabricated it using the e-beam lithography method. We present experimental verification and some computer simulation results.

Original languageEnglish
Pages (from-to)1587-1590
Number of pages4
JournalReview of Scientific Instruments
Volume69
Issue number4
Publication statusPublished - Apr 1998

Fingerprint

Interferometers
Lenses
interferometers
projection
lenses
Optical devices
Lithography
Computer simulation
lithography
computerized simulation
mirrors

ASJC Scopus subject areas

  • Instrumentation

Cite this

Räsänen, J. T., Peiponen, K. E., Abedin, K. M., Tenjimbayashi, K., Eiju, T., & Matsuda, K. (1998). Integrated scatter plate and projection lens for scatter plate interferometer. Review of Scientific Instruments, 69(4), 1587-1590.

Integrated scatter plate and projection lens for scatter plate interferometer. / Räsänen, Jari T.; Peiponen, Kai Erik; Abedin, Kazi Monowar; Tenjimbayashi, Koji; Eiju, Tomoaki; Matsuda, Kiyofumi.

In: Review of Scientific Instruments, Vol. 69, No. 4, 04.1998, p. 1587-1590.

Research output: Contribution to journalArticle

Räsänen, JT, Peiponen, KE, Abedin, KM, Tenjimbayashi, K, Eiju, T & Matsuda, K 1998, 'Integrated scatter plate and projection lens for scatter plate interferometer', Review of Scientific Instruments, vol. 69, no. 4, pp. 1587-1590.
Räsänen JT, Peiponen KE, Abedin KM, Tenjimbayashi K, Eiju T, Matsuda K. Integrated scatter plate and projection lens for scatter plate interferometer. Review of Scientific Instruments. 1998 Apr;69(4):1587-1590.
Räsänen, Jari T. ; Peiponen, Kai Erik ; Abedin, Kazi Monowar ; Tenjimbayashi, Koji ; Eiju, Tomoaki ; Matsuda, Kiyofumi. / Integrated scatter plate and projection lens for scatter plate interferometer. In: Review of Scientific Instruments. 1998 ; Vol. 69, No. 4. pp. 1587-1590.
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