Scatter plate interferometers provide a precise method to test the quality of concave mirrors. In this article we describe a method to integrate a scatter plate and a projection lens into a single binary micro-optical element, which is a crucial part of the scatter plate interferometer. We have designed an integrated element with the aid of a computer and fabricated it using the e-beam lithography method. We present experimental verification and some computer simulation results.
|Number of pages||4|
|Journal||Review of Scientific Instruments|
|Publication status||Published - Apr 1998|
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