Integrated scatter plate and projection lens for scatter plate interferometer

Jari T. Räsänen; Kai Erik Peiponen; Kazi Monowar Abedin; Koji Tenjimbayashi; Tomoaki Eiju; Kiyofumi Matsuda

doi:10.1063/1.1148813

Integrated scatter plate and projection lens for scatter plate interferometer

Jari T. Räsänen^*, Kai Erik Peiponen, Kazi Monowar Abedin, Koji Tenjimbayashi, Tomoaki Eiju, Kiyofumi Matsuda

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Scatter plate interferometers provide a precise method to test the quality of concave mirrors. In this article we describe a method to integrate a scatter plate and a projection lens into a single binary micro-optical element, which is a crucial part of the scatter plate interferometer. We have designed an integrated element with the aid of a computer and fabricated it using the e-beam lithography method. We present experimental verification and some computer simulation results.

Original language	English
Pages (from-to)	1587-1590
Number of pages	4
Journal	Review of Scientific Instruments
Volume	69
Issue number	4
DOIs	https://doi.org/10.1063/1.1148813
Publication status	Published - Apr 1998
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

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10.1063/1.1148813

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title = "Integrated scatter plate and projection lens for scatter plate interferometer",

abstract = "Scatter plate interferometers provide a precise method to test the quality of concave mirrors. In this article we describe a method to integrate a scatter plate and a projection lens into a single binary micro-optical element, which is a crucial part of the scatter plate interferometer. We have designed an integrated element with the aid of a computer and fabricated it using the e-beam lithography method. We present experimental verification and some computer simulation results.",

author = "R{\"a}s{\"a}nen, {Jari T.} and Peiponen, {Kai Erik} and Abedin, {Kazi Monowar} and Koji Tenjimbayashi and Tomoaki Eiju and Kiyofumi Matsuda",

year = "1998",

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pages = "1587--1590",

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T1 - Integrated scatter plate and projection lens for scatter plate interferometer

AU - Räsänen, Jari T.

AU - Peiponen, Kai Erik

AU - Abedin, Kazi Monowar

AU - Tenjimbayashi, Koji

AU - Eiju, Tomoaki

AU - Matsuda, Kiyofumi

PY - 1998/4

Y1 - 1998/4

N2 - Scatter plate interferometers provide a precise method to test the quality of concave mirrors. In this article we describe a method to integrate a scatter plate and a projection lens into a single binary micro-optical element, which is a crucial part of the scatter plate interferometer. We have designed an integrated element with the aid of a computer and fabricated it using the e-beam lithography method. We present experimental verification and some computer simulation results.

AB - Scatter plate interferometers provide a precise method to test the quality of concave mirrors. In this article we describe a method to integrate a scatter plate and a projection lens into a single binary micro-optical element, which is a crucial part of the scatter plate interferometer. We have designed an integrated element with the aid of a computer and fabricated it using the e-beam lithography method. We present experimental verification and some computer simulation results.

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DO - 10.1063/1.1148813

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JF - Review of Scientific Instruments

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Integrated scatter plate and projection lens for scatter plate interferometer

Abstract

ASJC Scopus subject areas

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