@inproceedings{b881aaaccc8346a2a8f0a2750092a9c4,
title = "FEM model of electrostatically actuated MEMS temperature sensor",
abstract = "Micro electromechanical system (MEMS) is an emerging technology that gives high accuracy and high speed with least error due to the micro dimension. To design a simple but accurate MEMS sensors remains a challenge. Modeling of a MEMS temperature sensor, using simple microcantilever structure, is represented in this paper. The sensor is actuated electrostatically. The effect of temperature on the resonance was calculated ANSYS software. The device was made of copper (contact electrode), silicon (vibrating part) and silicon oxide (insulation layer). When the temperature varies the properties of the MEMS device also changes and hence the resonance frequency.",
keywords = "FEM Model, actuated MEMS, electrostatical, temperature sensor",
author = "Ammar Atia and Moayad Ibrahim and Omer Abdul-Jabbar and Musaab Hassan",
year = "2013",
doi = "10.1109/ICCEEE.2013.6633959",
language = "English",
isbn = "9781467362313",
series = "Proceedings - 2013 International Conference on Computer, Electrical and Electronics Engineering: 'Research Makes a Difference', ICCEEE 2013",
pages = "341--344",
booktitle = "Proceedings - 2013 International Conference on Computer, Electrical and Electronics Engineering",
note = "2013 1st IEEE International Conference on Computing, Electrical and Electronics Engineering, ICCEEE 2013 ; Conference date: 26-08-2013 Through 28-08-2013",
}