FEM model of electrostatically actuated MEMS temperature sensor

Ammar Atia, Moayad Ibrahim, Omer Abdul-Jabbar, Musaab Hassan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micro electromechanical system (MEMS) is an emerging technology that gives high accuracy and high speed with least error due to the micro dimension. To design a simple but accurate MEMS sensors remains a challenge. Modeling of a MEMS temperature sensor, using simple microcantilever structure, is represented in this paper. The sensor is actuated electrostatically. The effect of temperature on the resonance was calculated ANSYS software. The device was made of copper (contact electrode), silicon (vibrating part) and silicon oxide (insulation layer). When the temperature varies the properties of the MEMS device also changes and hence the resonance frequency.

Original languageEnglish
Title of host publicationProceedings - 2013 International Conference on Computer, Electrical and Electronics Engineering
Subtitle of host publication'Research Makes a Difference', ICCEEE 2013
Pages341-344
Number of pages4
DOIs
Publication statusPublished - 2013
Event2013 1st IEEE International Conference on Computing, Electrical and Electronics Engineering, ICCEEE 2013 - Khartoum, Sudan
Duration: Aug 26 2013Aug 28 2013

Other

Other2013 1st IEEE International Conference on Computing, Electrical and Electronics Engineering, ICCEEE 2013
CountrySudan
CityKhartoum
Period8/26/138/28/13

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Keywords

  • actuated MEMS
  • electrostatical
  • FEM Model
  • temperature sensor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Atia, A., Ibrahim, M., Abdul-Jabbar, O., & Hassan, M. (2013). FEM model of electrostatically actuated MEMS temperature sensor. In Proceedings - 2013 International Conference on Computer, Electrical and Electronics Engineering: 'Research Makes a Difference', ICCEEE 2013 (pp. 341-344). [6633959] https://doi.org/10.1109/ICCEEE.2013.6633959