Fabrication of SiC microelectromechanical systems using one-step dry etching

Liudi Jiang*, R. Cheung, M. Hassan, A. J. Harris, J. S. Burdess, C. A. Zorman, M. Mehregany

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

40 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science