Exploration of the response of electrically actuated mems arches under the effect of mechanical shock loads

Jihad E. Alqasimi, Hassen M. Ouakad

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work investigates the modeling and simulation of the dynamic response of MEMS shallow arches under the combined effects of mechanical shock waves and electrostatic actuating forces. The possible instabilities and/or failures that can be considered in any reliability study of such bi-stable structures are numerically examined. The results demonstrate that the simultaneous effects of shock loads and the actuating force can make the bi-stability and/or the instability thresholds of electrically actuated MEMS arches devices much lower than the predicted values when considering their effects independently. The outcomes of this investigation can be very useful to design smart MEMS bi-stable sensors/accelerometers activated at a pre-programmed level of shock and/or abrupt change in the acceleration.

Original languageEnglish
Title of host publicationDynamics, Vibration, and Control
PublisherAmerican Society of Mechanical Engineers(ASME)
ISBN (Electronic)9780791858387
DOIs
Publication statusPublished - Jan 1 2017
Externally publishedYes
EventASME 2017 International Mechanical Engineering Congress and Exposition, IMECE 2017 - Tampa, United States
Duration: Nov 3 2017Nov 9 2017

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume4B-2017

Other

OtherASME 2017 International Mechanical Engineering Congress and Exposition, IMECE 2017
CountryUnited States
CityTampa
Period11/3/1711/9/17

ASJC Scopus subject areas

  • Mechanical Engineering

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