Establishing an accurate depth-scale calibration in the top few nanometers of an ultrashallow implant profile

M. G. Dowsett, S. H. Al-Harthi, T. J. Ormsby, B. Guzmán, F. S. Gard, T. C Q Noakes, P. Bailey, C. F. McConville*

*Corresponding author for this work

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3 Citations (Scopus)

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