Dynamic Analysis of Multilayers Based MEMS Resonators

Hassen M. Ouakad*, Abdulrahman M. Alofi, Ali H. Nayfeh

*Corresponding author for this work

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The dynamic behavior of a microelectromechanical system (MEMS) parallel and electrically coupled double-layers (microbeams) based resonator is investigated. Two numerical methods were used to solve the dynamical problem: the reduced-order modeling (ROM) and the perturbation method. The ROM was derived using the so-called Galerkin expansion with considering the linear undamped mode shapes of straight beam as the basis functions. The perturbation method was generated using the method of multiple scales by direct attack of the equations of motion. Dynamic analyses, assuming the above two numerical methods were performed, and a comparison of the results showed good agreement. Finally, a parametric study was performed using the perturbation on different parameters and the results revealed different interesting features, which hopefully can be useful for some MEMS based applications.

Original languageEnglish
Article number1262650
JournalMathematical Problems in Engineering
Volume2017
DOIs
Publication statusPublished - Jan 1 2017
Externally publishedYes

ASJC Scopus subject areas

  • Mathematics(all)
  • Engineering(all)

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