@inproceedings{2b45200735974f1cb198dd37b3c1324f,
title = "Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applications",
abstract = "This paper presents a mechanical model for a polysilicon double-ended tuning fork (DETF) that is implemented as force sensor. This sensor is integrated into a compliant, passive microgripper utilized in a microassembly of 3D MEMS structures. An expression for resonant frequency of DETF is derived. Theoretical model is introduced to analyze the quality factor (Q-factor) of the resonator. The DETF is found to have a maximum Q-factor of 863. In addition, the characteristics of the snap-lit interlocking mechanism are modeled analytically. An optimization scheme is employed to determine the optimal dimensions that provide a maximum reliable amplification factor (A-factor) of the microleverage mechanism. Based on the simulation, the maximum A-factor is 26.12. The model presented here permits a gauge factor (i.e., sensitivity) of 5000 ppm/μN at compressive force of 80μN and A-faclor of 25. The superior results obtained support the feasibility of DETF as a resonant force sensor for microgripping applications.",
keywords = "DETF, Microassembly, Microgripper, Microleverage, Q factor, Resonant sensing, Snap fit",
author = "Bahadur, {Issam B.} and Mills, {James K.}",
year = "2006",
doi = "10.1117/12.644429",
language = "English",
isbn = "0819461539",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V ; Conference date: 25-01-2006 Through 26-01-2006",
}