Design of a MEMS-based resonant force sensor for compliant, passive microgripping

Issam Bait Bahadur, James Mills, Yu Sun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

In this paper, a polysilicon double-ended tuning fork (DETF) is proposed for use as a force sensor for integration into a compliant, passive microgripper used in a microassembly of 3D MEMS structures. The force sensor is also designed to operate in a manner similar to scanning probe microscopy (SPM) that is commonly utilized to study surface properties and topography of material. The design, modeling, and performance characteristics of the resonant force sensor are addressed. The force sensor design has a resolution of 1.0 pN/√H z in absence of electronics and power noises. Furthermore, a gauge factor (i.e. sensitivity) of 1700 is obtained with applied force of 30 μN. A DETF excitation and detection technique is proposed to minimize parasitic capacitance effects.

Original languageEnglish
Title of host publicationIEEE International Conference on Mechatronics and Automation, ICMA 2005
Pages77-82
Number of pages6
Publication statusPublished - 2005
EventIEEE International Conference on Mechatronics and Automation, ICMA 2005 - Niagara Falls, ON, Canada
Duration: Jul 29 2005Aug 1 2005

Other

OtherIEEE International Conference on Mechatronics and Automation, ICMA 2005
CountryCanada
CityNiagara Falls, ON
Period7/29/058/1/05

Fingerprint

MEMS
Sensors
Tuning
Scanning probe microscopy
Surface topography
Polysilicon
Gages
Surface properties
Capacitance
Electronic equipment

Keywords

  • DETF microgripper
  • MEMS
  • Microassembly
  • Resonant force sensing

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Bahadur, I. B., Mills, J., & Sun, Y. (2005). Design of a MEMS-based resonant force sensor for compliant, passive microgripping. In IEEE International Conference on Mechatronics and Automation, ICMA 2005 (pp. 77-82)

Design of a MEMS-based resonant force sensor for compliant, passive microgripping. / Bahadur, Issam Bait; Mills, James; Sun, Yu.

IEEE International Conference on Mechatronics and Automation, ICMA 2005. 2005. p. 77-82.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bahadur, IB, Mills, J & Sun, Y 2005, Design of a MEMS-based resonant force sensor for compliant, passive microgripping. in IEEE International Conference on Mechatronics and Automation, ICMA 2005. pp. 77-82, IEEE International Conference on Mechatronics and Automation, ICMA 2005, Niagara Falls, ON, Canada, 7/29/05.
Bahadur IB, Mills J, Sun Y. Design of a MEMS-based resonant force sensor for compliant, passive microgripping. In IEEE International Conference on Mechatronics and Automation, ICMA 2005. 2005. p. 77-82
Bahadur, Issam Bait ; Mills, James ; Sun, Yu. / Design of a MEMS-based resonant force sensor for compliant, passive microgripping. IEEE International Conference on Mechatronics and Automation, ICMA 2005. 2005. pp. 77-82
@inproceedings{a02dbfae71cd443f89b22c45873850b3,
title = "Design of a MEMS-based resonant force sensor for compliant, passive microgripping",
abstract = "In this paper, a polysilicon double-ended tuning fork (DETF) is proposed for use as a force sensor for integration into a compliant, passive microgripper used in a microassembly of 3D MEMS structures. The force sensor is also designed to operate in a manner similar to scanning probe microscopy (SPM) that is commonly utilized to study surface properties and topography of material. The design, modeling, and performance characteristics of the resonant force sensor are addressed. The force sensor design has a resolution of 1.0 pN/√H z in absence of electronics and power noises. Furthermore, a gauge factor (i.e. sensitivity) of 1700 is obtained with applied force of 30 μN. A DETF excitation and detection technique is proposed to minimize parasitic capacitance effects.",
keywords = "DETF microgripper, MEMS, Microassembly, Resonant force sensing",
author = "Bahadur, {Issam Bait} and James Mills and Yu Sun",
year = "2005",
language = "English",
isbn = "0780390458",
pages = "77--82",
booktitle = "IEEE International Conference on Mechatronics and Automation, ICMA 2005",

}

TY - GEN

T1 - Design of a MEMS-based resonant force sensor for compliant, passive microgripping

AU - Bahadur, Issam Bait

AU - Mills, James

AU - Sun, Yu

PY - 2005

Y1 - 2005

N2 - In this paper, a polysilicon double-ended tuning fork (DETF) is proposed for use as a force sensor for integration into a compliant, passive microgripper used in a microassembly of 3D MEMS structures. The force sensor is also designed to operate in a manner similar to scanning probe microscopy (SPM) that is commonly utilized to study surface properties and topography of material. The design, modeling, and performance characteristics of the resonant force sensor are addressed. The force sensor design has a resolution of 1.0 pN/√H z in absence of electronics and power noises. Furthermore, a gauge factor (i.e. sensitivity) of 1700 is obtained with applied force of 30 μN. A DETF excitation and detection technique is proposed to minimize parasitic capacitance effects.

AB - In this paper, a polysilicon double-ended tuning fork (DETF) is proposed for use as a force sensor for integration into a compliant, passive microgripper used in a microassembly of 3D MEMS structures. The force sensor is also designed to operate in a manner similar to scanning probe microscopy (SPM) that is commonly utilized to study surface properties and topography of material. The design, modeling, and performance characteristics of the resonant force sensor are addressed. The force sensor design has a resolution of 1.0 pN/√H z in absence of electronics and power noises. Furthermore, a gauge factor (i.e. sensitivity) of 1700 is obtained with applied force of 30 μN. A DETF excitation and detection technique is proposed to minimize parasitic capacitance effects.

KW - DETF microgripper

KW - MEMS

KW - Microassembly

KW - Resonant force sensing

UR - http://www.scopus.com/inward/record.url?scp=27744552118&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=27744552118&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:27744552118

SN - 0780390458

SP - 77

EP - 82

BT - IEEE International Conference on Mechatronics and Automation, ICMA 2005

ER -