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Characterization of plasma etching induced interface states at Tip-SiGe Schottky contacts
M. Mamor
*
,
A. Sellai
*
Corresponding author for this work
Physics
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Article
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peer-review
8
Citations (Scopus)
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Physics
Plasma Etching
100%
Argon Plasma
100%
Material Science
Plasma Etching
100%