Arched beam based energy harvester using electrostatic transduction for general in-plane excitations

M. A. Ben Hassena, H. Samaali, H. M. Ouakad, F. Najar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new design of a MEMS Energy Harvester (EH), based on an arched microbeam with electrostatic transduction, is proposed in this paper. The design consists of a single transducer composed of two masses designed to move in perpendicular directions and linked by the arched microbeam. Thanks to the proposed design the axial motion is converted and amplified into a perpendicular motion and vice versa. We derive a mathematical model by presenting the governing equations of the coupled electromechanical system. A static Finite Element analysis is also performed to validate the reliability of the proposed device and showed that a 10 times amplification can be achieved for the input motion. The solved analytical dynamic analysis demonstrates the practicability of the device for different in plane directions of the excitation. For optimal conditions it was shown that the initial polarization voltage can be doubled for a 20 s excitation.

Original languageEnglish
Title of host publication18th IEEE International Multi-Conference on Systems, Signals and Devices, SSD 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages210-215
Number of pages6
ISBN (Electronic)9781665414937
DOIs
Publication statusPublished - Mar 22 2021
Event18th IEEE International Multi-Conference on Systems, Signals and Devices, SSD 2021 - Monastir, Tunisia
Duration: Mar 22 2021Mar 25 2021

Publication series

Name18th IEEE International Multi-Conference on Systems, Signals and Devices, SSD 2021

Conference

Conference18th IEEE International Multi-Conference on Systems, Signals and Devices, SSD 2021
Country/TerritoryTunisia
CityMonastir
Period3/22/213/25/21

Keywords

  • Arched beam
  • compliant mechanism
  • Electrostatic transducers
  • Energy Harvester
  • MEMS
  • motion amplification

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Computer Science Applications
  • Signal Processing
  • Electrical and Electronic Engineering

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