Annealing effect on the structural and magnetic properties of MN-implanted 6h-sic

Maya Al Azri, Khalid Bouziane, Mohamed Elzain, Salim M. Chérif, Alain Declémy, Lionel Thomé, Michel Viret

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

n-type 6H-SiC(0001) substrates were implanted with a fluence of Mn+ 5 × 1016) (maximum Mn content of 7%), with implantation energy of 80 keV and substrate temperature of 365 °C to promote recrystallization. The samples were characterized using Rutherford backscattering and channeling (RBS/C) spectroscopy and electron probe microanalysis in the energy dispersive X-ray (EPMA-EDX) technique; while the magnetization was studied using a superconducting quantum interference device techniques. In the as-implanted sample, three well-defined specific defect zones were identified as deduced from the analysis of RBS/C spectra. It is shown that the two main vacancy-related and interstitial-related defects undergo limited changes when annealing at 800 °C, while a major recovery is obtained after annealing at 1100 °C. Strain relaxation was also observed upon annealing as determined from HRXRD. Magnetization was strongly reduced with increasing annealing temperature from 800 °C to 1600 °C. This effect seems to be related to the dilution effect (reduction of Mn content) due to the local diffusion of Mn as suggested from the results obtained using both RBS/C and EPMA-EDX techniques.

Original languageEnglish
Article number6971661
JournalIEEE Transactions on Magnetics
Volume50
Issue number11
DOIs
Publication statusPublished - Nov 1 2014

Fingerprint

Structural properties
Magnetic properties
Rutherford backscattering spectroscopy
Annealing
Electron probe microanalysis
Magnetization
Strain relaxation
X rays
Defects
SQUIDs
Substrates
Ion implantation
Dilution
Vacancies
Spectroscopy
Recovery
Temperature

Keywords

  • Annealing effect
  • diluted magnetic semiconductors (DMSs)
  • implantation
  • silicon carbide (SiC)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Azri, M. A., Bouziane, K., Elzain, M., Chérif, S. M., Declémy, A., Thomé, L., & Viret, M. (2014). Annealing effect on the structural and magnetic properties of MN-implanted 6h-sic. IEEE Transactions on Magnetics, 50(11), [6971661]. https://doi.org/10.1109/TMAG.2014.2325902

Annealing effect on the structural and magnetic properties of MN-implanted 6h-sic. / Azri, Maya Al; Bouziane, Khalid; Elzain, Mohamed; Chérif, Salim M.; Declémy, Alain; Thomé, Lionel; Viret, Michel.

In: IEEE Transactions on Magnetics, Vol. 50, No. 11, 6971661, 01.11.2014.

Research output: Contribution to journalArticle

Azri, Maya Al ; Bouziane, Khalid ; Elzain, Mohamed ; Chérif, Salim M. ; Declémy, Alain ; Thomé, Lionel ; Viret, Michel. / Annealing effect on the structural and magnetic properties of MN-implanted 6h-sic. In: IEEE Transactions on Magnetics. 2014 ; Vol. 50, No. 11.
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