An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators

Mohammad H. Hasan, Hassen M. Ouakad, Nizar R. Jaber, Md Abdullah Al Hafiz, Fadi Alsaleem, Mohammad Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system’s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.

Original languageEnglish
Title of host publication23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers(ASME)
ISBN (Electronic)9780791851791
DOIs
Publication statusPublished - Jan 1 2018
Externally publishedYes
EventASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2018 - Quebec City, Canada
Duration: Aug 26 2018Aug 29 2018

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Conference

ConferenceASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2018
CountryCanada
CityQuebec City
Period8/26/188/29/18

ASJC Scopus subject areas

  • Mechanical Engineering
  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Modelling and Simulation

Cite this

Hasan, M. H., Ouakad, H. M., Jaber, N. R., Al Hafiz, M. A., Alsaleem, F., & Younis, M. (2018). An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators. In 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4). American Society of Mechanical Engineers(ASME). https://doi.org/10.1115/DETC2018-85887