A novel threshold pressure sensor based on nonlinear dynamics of MEMS arches

Mohammad H. Hasan, Fadi M. Alsaleem, Hassen M. Ouakad

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, we propose a new tunable pressure sensor based on the nonlinear snap-through instability of an electrically actuated shallow arch microbeam. The general concept of the sensor can be explained as follows: the shallow arch is excited to trigger dynamic snap-through instability yielding a high output amplitude, if the system operating pressure is below a threshold value. This state is interpreted as a digital logic 1. Once the varying pressure exceeds that threshold value, the arch gains its stability. Therefore, the new state would be interpreted as a digital logic 0 value. We show an example of an operation range of the proposed sensor by identifying the relationship between the excitation AC voltage and the critical cut-off pressure.

Original languageEnglish
Title of host publication13th ASME/IEEE International Conference on Mechatronic and Embedded Systems and Applications
PublisherAmerican Society of Mechanical Engineers(ASME)
ISBN (Electronic)9780791858233
DOIs
Publication statusPublished - Jan 1 2017
Externally publishedYes
EventASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 - Cleveland, United States
Duration: Aug 6 2017Aug 9 2017

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume9

Other

OtherASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
CountryUnited States
CityCleveland
Period8/6/178/9/17

ASJC Scopus subject areas

  • Mechanical Engineering
  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Modelling and Simulation

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