• 144 Citations
  • 5 h-Index
20032017
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Research Output 2003 2017

  • 144 Citations
  • 5 h-Index
  • 10 Article
  • 1 Conference contribution
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Conference contribution
2013

FEM model of electrostatically actuated MEMS temperature sensor

Atia, A., Ibrahim, M., Abdul-Jabbar, O. & Hassan, M., 2013, Proceedings - 2013 International Conference on Computer, Electrical and Electronics Engineering: 'Research Makes a Difference', ICCEEE 2013. p. 341-344 4 p. 6633959

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Temperature sensors
MEMS
Finite element method
Silicon oxides
Sensors