Engineering & Materials Science
MEMS
100%
Silicon carbide
79%
Electric potential
76%
Piezoelectric actuators
69%
Dry etching
64%
Actuators
60%
Ohmic contacts
44%
Fabrication
43%
Resonators
41%
Crystalline materials
41%
Microactuators
40%
Resistors
39%
Curbs
39%
Electrostatics
36%
Electrodes
35%
Grippers
35%
Platinum
34%
Residual stresses
34%
Inductively coupled plasma
33%
Temperature sensors
31%
Thermal gradients
30%
Particle swarm optimization (PSO)
24%
Temperature
23%
Electrostatic actuators
22%
Metals
22%
Networks (circuits)
21%
Silicon
21%
Surface micromachining
20%
Microstructure
19%
Mechanical properties
19%
Finite element method
18%
Testing
17%
Focused ion beams
13%
Entropy
12%
Elastic moduli
12%
Tensile stress
12%
Communication systems
11%
Metallizing
11%
Single crystals
11%
Polysilicon
11%
Silicon oxides
10%
Short circuit currents
9%
Acoustic waves
9%
Patient treatment
9%
Deterioration
8%
Microelectromechanical devices
8%
Analytical models
8%
Materials properties
8%
Sensors
7%
Pickups
7%
Chemical Compounds
silicon carbide
70%
Ohmic contacts
44%
Resonators
41%
Crystalline materials
41%
Curbs
39%
Electric potential
38%
Actuators
37%
Electrostatics
36%
Grippers
35%
Piezoelectric actuators
34%
Residual stresses
34%
MEMS
31%
Platinum
31%
Thermal gradients
30%
Electrodes
30%
Metals
29%
Resistors
28%
Silicon
23%
Electrostatic actuators
22%
Inductively coupled plasma
22%
Fabrication
21%
Dry etching
21%
Surface micromachining
20%
Microstructure
19%
Mechanical properties
19%
Testing
17%
Temperature
17%
Focused ion beams
13%
Elastic moduli
12%
Communication systems
11%
Metallizing
11%
Single crystals
11%
Polysilicon
11%
Short circuit currents
9%
Deterioration
8%
Microelectromechanical devices
8%
Analytical models
8%
silicon nitride
8%
Materials properties
8%
Joule heating
6%
Position control
6%
Thick films
5%
Oxides
5%
Medical applications
5%
Networks (circuits)
5%
Velocity measurement
5%
Physics & Astronomy
microelectromechanical systems
71%
silicon carbides
71%
actuation
57%
residual stress
45%
bridges (structures)
44%
actuators
36%
fabrication
35%
electrostatics
33%
resonators
33%
etching
33%
platinum
28%
electric potential
27%
electric contacts
25%
temperature gradients
25%
modulus of elasticity
23%
room temperature
21%
tensile stress
20%
mechanical properties
19%
microstructure
17%
Joule heating
17%
electrodes
17%
assembling
17%
micromachining
16%
metals
13%
telecommunication
13%
silicon
13%
manipulators
13%
computer programs
10%
filters
10%
deterioration
10%
temperature
10%
heat
9%
thick films
9%
resonant frequencies
8%
ion beams
7%
performance
7%
electromechanical devices
7%
excitation
7%
short circuits
7%
gradients
6%
temperature dependence
6%
oxides
6%
microbeams
6%
modal response
5%
coefficients
5%