Engineering & Materials Science
MEMS
100%
Arches
71%
Resonators
70%
Electrostatic force
61%
Carbon nanotubes
50%
Electrostatics
43%
Natural frequencies
39%
Actuators
38%
NEMS
29%
Dynamic response
22%
Electrodes
21%
Electric potential
21%
Electric fields
18%
Stretching
16%
Nanotubes
12%
Frequency response
12%
Chemical sensors
12%
Decomposition
11%
Microsystems
10%
Equations of motion
10%
Nonlinear equations
10%
Dynamic analysis
10%
Pressure sensors
10%
Single-walled carbon nanotubes (SWCN)
9%
Vibrators
9%
Finite difference method
9%
Orbits
9%
Nonlinear feedback
8%
Multilayers
8%
Rotors
7%
Nanosystems
7%
Polysilicon
7%
Sensors
7%
Mathematical models
7%
Van der Waals forces
7%
Atmospheric humidity
6%
Galerkin methods
6%
Energy harvesting
6%
Electric loads
6%
Fabrication
6%
Squeeze films
6%
Switches
6%
Harvesters
6%
Elasticity
6%
Ordinary differential equations
6%
Chemical activation
6%
Set theory
6%
Electric excitation
6%
Wind turbines
6%
Finite element method
6%
Mathematics
Micro-electro-mechanical Systems
62%
Resonator
44%
Nanotubes
38%
Carbon
35%
Actuator
30%
Arch
24%
Natural Frequency
23%
Electrostatics
19%
Voltage
16%
Reduced Order Model
16%
Mode Shape
16%
Electrode
15%
Arrangement
13%
Electrostatic Force
13%
Single-walled Carbon Nanotubes
13%
Dynamic Behavior
13%
Dynamic Response
13%
Strain Gradient
13%
Galerkin
13%
Curved Beam
12%
Multilayer
12%
Pressure Sensor
11%
Nonlinear Dynamics
11%
Influence
10%
Excitation
9%
Dynamic Analysis
9%
Euler-Bernoulli Beam
9%
Modeling and Simulation
8%
Activation
8%
Curvature
7%
Modeling
7%
Model
7%
Sensor
7%
Straight
7%
Gas Sensor
7%
Perturbation Method
7%
Configuration
7%
Reduced-order Modeling
7%
Scale Parameter
7%
Stability Analysis
7%
Shock
6%
Method of multiple Scales
6%
Nonlocal Elasticity
6%
Internal Resonance
6%
Sensing
6%
Discretization
6%
Energy Harvesting
6%
Cantilever
6%
Cantilever Beam
6%
Relative Humidity
6%
Physics & Astronomy
microelectromechanical systems
34%
arches
31%
microbeams
24%
electrostatics
15%
actuators
12%
resonators
11%
shock loads
11%
resonant frequencies
11%
mechanical shock
10%
nanotubes
10%
deflection
9%
direct current
8%
dynamic response
7%
electric fields
6%
forced vibration
6%
elastic properties
6%
carbon nanotubes
6%
boron nitrides
6%
actuation
5%
frequency response
5%
modal response
5%
alternating current
5%
nonlinearity
5%
buckling
5%