ملخص
A novel planarization scheme, consisting of compression of a low glass transition temperature (Tg) and low viscosity poly(methyl methacrylate) (PMMA) polymer into grooves of patterned recording media using a surface with flat morphology, has been proposed and investigated. Si (100) surface was used as the smooth surface for pressing PMMA onto the patterned media. Patterned samples prepared with such a planarization method showed very smooth topography of roughness as small as 3 Å (which is comparable to present hard disk media based on continuous film) by atomic force microscope. A magnetic sacrificial layer is proposed in addition as a solution to etching or polishing issues.
اللغة الأصلية | English |
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الصفحات (من إلى) | 806-808 |
عدد الصفحات | 3 |
دورية | Journal of Vacuum Science and Technology B |
مستوى الصوت | 28 |
رقم الإصدار | 4 |
المعرِّفات الرقمية للأشياء | |
حالة النشر | Published - 2010 |
منشور خارجيًا | نعم |
ASJC Scopus subject areas
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