ملخص
In this paper, we investigate the effects of electric fringing-fields on the structural behavior of a MEMS shallow arch. We consider the Galerkin method-based reduced-order modeling to discretize the governing nonlinear equation and obtain a lumped-parameter model of the system. We then assume two most well-known models for demonstrating the fringing-fields effects, that is the Palmer’s and the Mejis-Fokkema models. Using the discretized model, we investigate the system nonlinear behavior assuming the two electric fringing-fields models. The presented results show that for these particular cases of arch configuration, fringing-fields effects should be considered since it improves the prediction of corresponding voltages for both snap-through and pull-in structural instabilities as well as the overall static deflection of the MEMS arch. Comparisons of the acquired numerical results with some available experimental data as well as ANSYS® based finite-elements simulations confirm that neglecting the fringing-fields effects in MEMS arches can represent a significant source of error which should be avoided using much more accurate modeling techniques.
اللغة الأصلية | English |
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الصفحات (من إلى) | 1391-1399 |
عدد الصفحات | 9 |
دورية | Microsystem Technologies |
مستوى الصوت | 24 |
رقم الإصدار | 3 |
المعرِّفات الرقمية للأشياء | |
حالة النشر | Published - مارس 1 2018 |
منشور خارجيًا | نعم |
ASJC Scopus subject areas
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- ???subjectarea.asjc.3100.3104???
- ???subjectarea.asjc.1700.1708???
- ???subjectarea.asjc.2200.2208???