TY - GEN
T1 - Electrical characteristics of graphene wrinkles extracted by conductive Atomic Force Microscopy and electrical measurements on kelvin structures
AU - Alnemer, Omar
AU - Ally, Helmy
AU - Alshehhi, Aamna
AU - Saadat, Man
AU - Souier, Tewfik
AU - Gougam, Adel B.
AU - Nayfeh, Hasan
PY - 2013
Y1 - 2013
N2 - One of the key deliverables of using graphene as a channel in transistors is to achieve low source and drain parasitic contact resistance. Careful characterization of the surface of graphene is needed in order to improve understanding of the metal to graphene interface. In this paper, we employ conductive Atomic Force Microscope (C-AFM) to characterize the electrical properties of these wrinkles as a function of the applied force. At low forces, the wrinkles are more conductive than flat regions and at high forces the wrinkles have similar conductance as the flat regions. Graphene devices were fabricated and the total resistance of graphene in these devices was measured to be in the range 2ω to 10Mω. Additional research is planned to investigate if the wrinkles impact the electrical contact resistance of large area structures.
AB - One of the key deliverables of using graphene as a channel in transistors is to achieve low source and drain parasitic contact resistance. Careful characterization of the surface of graphene is needed in order to improve understanding of the metal to graphene interface. In this paper, we employ conductive Atomic Force Microscope (C-AFM) to characterize the electrical properties of these wrinkles as a function of the applied force. At low forces, the wrinkles are more conductive than flat regions and at high forces the wrinkles have similar conductance as the flat regions. Graphene devices were fabricated and the total resistance of graphene in these devices was measured to be in the range 2ω to 10Mω. Additional research is planned to investigate if the wrinkles impact the electrical contact resistance of large area structures.
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U2 - 10.1109/DTIS.2013.6527806
DO - 10.1109/DTIS.2013.6527806
M3 - Conference contribution
AN - SCOPUS:84881140093
SN - 9781467360388
T3 - Proceedings of the 2013 8th International Conference on Design and Technology of Integrated Systems in Nanoscale Era, DTIS 2013
SP - 182
EP - 183
BT - Proceedings of the 2013 8th International Conference on Design and Technology of Integrated Systems in Nanoscale Era, DTIS 2013
T2 - 2013 8th International Conference on Design and Technology of Integrated Systems in Nanoscale Era, DTIS 2013
Y2 - 26 March 2013 through 28 March 2013
ER -