Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applications

Engineering

• Amplification Factor 100%
• Mechanical Model 100%
• Compressive Force 50%
• Gauge Factor 50%
• Polysilicon 50%

Physics

• Theoretical Model 50%
• Resonant Frequencies 50%
• Resonator 50%

Computer Science

• Resonant Frequency 50%