Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applications

Issam B. Bahadur*, James K. Mills

*المؤلف المقابل لهذا العمل

نتاج البحث

ملخص

This paper presents a mechanical model for a polysilicon double-ended tuning fork (DETF) that is implemented as force sensor. This sensor is integrated into a compliant, passive microgripper utilized in a microassembly of 3D MEMS structures. An expression for resonant frequency of DETF is derived. Theoretical model is introduced to analyze the quality factor (Q-factor) of the resonator. The DETF is found to have a maximum Q-factor of 863. In addition, the characteristics of the snap-lit interlocking mechanism are modeled analytically. An optimization scheme is employed to determine the optimal dimensions that provide a maximum reliable amplification factor (A-factor) of the microleverage mechanism. Based on the simulation, the maximum A-factor is 26.12. The model presented here permits a gauge factor (i.e., sensitivity) of 5000 ppm/μN at compressive force of 80μN and A-faclor of 25. The superior results obtained support the feasibility of DETF as a resonant force sensor for microgripping applications.

اللغة الأصليةEnglish
عنوان منشور المضيفProceedings of SPIE - The International Society for Optical Engineering
المعرِّفات الرقمية للأشياء
حالة النشرPublished - 2006
منشور خارجيًانعم
الحدثReliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - San Jose, CA
المدة: يناير ٢٥ ٢٠٠٦يناير ٢٦ ٢٠٠٦

سلسلة المنشورات

الاسمProceedings of SPIE - The International Society for Optical Engineering
مستوى الصوت6111
رقم المعيار الدولي للدوريات (المطبوع)0277-786X

Other

OtherReliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
الدولة/الإقليمUnited States
المدينةSan Jose, CA
المدة١/٢٥/٠٦١/٢٦/٠٦

ASJC Scopus subject areas

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  • ???subjectarea.asjc.3100.3104???
  • ???subjectarea.asjc.1700.1706???
  • ???subjectarea.asjc.2600.2604???
  • ???subjectarea.asjc.2200.2208???

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