TY - GEN
T1 - Design of a MEMS-based resonant force sensor for compliant, passive microgripping
AU - Bahadur, Issam Bait
AU - Mills, James
AU - Sun, Yu
PY - 2005
Y1 - 2005
N2 - In this paper, a polysilicon double-ended tuning fork (DETF) is proposed for use as a force sensor for integration into a compliant, passive microgripper used in a microassembly of 3D MEMS structures. The force sensor is also designed to operate in a manner similar to scanning probe microscopy (SPM) that is commonly utilized to study surface properties and topography of material. The design, modeling, and performance characteristics of the resonant force sensor are addressed. The force sensor design has a resolution of 1.0 pN/√H z in absence of electronics and power noises. Furthermore, a gauge factor (i.e. sensitivity) of 1700 is obtained with applied force of 30 μN. A DETF excitation and detection technique is proposed to minimize parasitic capacitance effects.
AB - In this paper, a polysilicon double-ended tuning fork (DETF) is proposed for use as a force sensor for integration into a compliant, passive microgripper used in a microassembly of 3D MEMS structures. The force sensor is also designed to operate in a manner similar to scanning probe microscopy (SPM) that is commonly utilized to study surface properties and topography of material. The design, modeling, and performance characteristics of the resonant force sensor are addressed. The force sensor design has a resolution of 1.0 pN/√H z in absence of electronics and power noises. Furthermore, a gauge factor (i.e. sensitivity) of 1700 is obtained with applied force of 30 μN. A DETF excitation and detection technique is proposed to minimize parasitic capacitance effects.
KW - DETF microgripper
KW - MEMS
KW - Microassembly
KW - Resonant force sensing
UR - http://www.scopus.com/inward/record.url?scp=27744552118&partnerID=8YFLogxK
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M3 - Conference contribution
AN - SCOPUS:27744552118
SN - 0780390458
T3 - IEEE International Conference on Mechatronics and Automation, ICMA 2005
SP - 77
EP - 82
BT - IEEE International Conference on Mechatronics and Automation, ICMA 2005
T2 - IEEE International Conference on Mechatronics and Automation, ICMA 2005
Y2 - 29 July 2005 through 1 August 2005
ER -