TY - GEN
T1 - An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators
AU - Hasan, Mohammad H.
AU - Ouakad, Hassen M.
AU - Jaber, Nizar R.
AU - Al Hafiz, Md Abdullah
AU - Alsaleem, Fadi
AU - Younis, Mohammad
PY - 2018
Y1 - 2018
N2 - Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system’s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.
AB - Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system’s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.
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U2 - 10.1115/DETC2018-85887
DO - 10.1115/DETC2018-85887
M3 - Conference contribution
AN - SCOPUS:85056825999
T3 - Proceedings of the ASME Design Engineering Technical Conference
BT - 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
PB - American Society of Mechanical Engineers(ASME)
T2 - ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2018
Y2 - 26 August 2018 through 29 August 2018
ER -