A selective excitation mode design for a wider high-to-low frequencies tunable capacitive MEMS resonator

Physics

• Microelectromechanical System 100%
• Microstructure 66%
• Resonator 66%
• Electrodes 33%
• Resonant Frequencies 33%
• Equations of Motion 33%
• Microbeam 33%

Engineering

• Effective Mass 33%
• Modal Decomposition 33%
• Design Mode 33%

Computer Science

• Research Paper 33%
• Resonant Frequency 33%
• Original Approach 33%