TY - GEN
T1 - A new concept for humidity sensing using curved micro-beams
AU - Ouakad, H.
AU - Hasan, M. H.
AU - Alsaleem, F.
PY - 2017
Y1 - 2017
N2 - There are number of common humidity sensing methods in MEMS. They include capacitive, resistive, and thermal methods. Among these methods, capacitive sensing is considered the most common in MEMS. In this method, changes of a capacitor dielectric constant, due to the absorption of air water vapor into a coating layer is correlated to humidity. The slow sensor time response and the degradation of the coating material over time are the major limitations of this method. Humidity have recently been studied as significant sources for environmental noise that, if ignored while operating a typical MEMS sensor, may lead to poor performance. In this work, we propose the utilization of this effect to overcome the challenging limitations of the humidity capacitive sensing. Specifically, we propose the use of an uncoated arch micro-beam to detect changes in the thermal properties of air due to humidity. Found to amplify these changes by orders of magnitude due to the richness of its nonlinear dynamics, an arch beam was selected for this investigation. These amplified effects become the measurements of interest, rather than being treated as noise. This new way of sensing humidity, can eliminate the need for the coating layer and significantly decrease the sensor response time.
AB - There are number of common humidity sensing methods in MEMS. They include capacitive, resistive, and thermal methods. Among these methods, capacitive sensing is considered the most common in MEMS. In this method, changes of a capacitor dielectric constant, due to the absorption of air water vapor into a coating layer is correlated to humidity. The slow sensor time response and the degradation of the coating material over time are the major limitations of this method. Humidity have recently been studied as significant sources for environmental noise that, if ignored while operating a typical MEMS sensor, may lead to poor performance. In this work, we propose the utilization of this effect to overcome the challenging limitations of the humidity capacitive sensing. Specifically, we propose the use of an uncoated arch micro-beam to detect changes in the thermal properties of air due to humidity. Found to amplify these changes by orders of magnitude due to the richness of its nonlinear dynamics, an arch beam was selected for this investigation. These amplified effects become the measurements of interest, rather than being treated as noise. This new way of sensing humidity, can eliminate the need for the coating layer and significantly decrease the sensor response time.
KW - Arched microbeam
KW - Humidity
KW - MEMS
KW - Non-coated
KW - Squeeze-Film-Damping
UR - http://www.scopus.com/inward/record.url?scp=85029323227&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85029323227&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85029323227
T3 - Advanced Materials - TechConnect Briefs 2017
SP - 112
EP - 115
BT - Informatics, Electronics and Microsystems - TechConnect Briefs 2017
A2 - Case, Fiona
A2 - Laudon, Matthew
A2 - Romanowicz, Bart
A2 - Case, Fiona
PB - TechConnect
T2 - 11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo, and the 2017 National SBIR/STTR Conference
Y2 - 14 May 2017 through 17 May 2017
ER -